Semiconductor/TFT/LED/ solar / flat panel display

GP has been working with integrated circuit manufacturers for a long time to develop a highly pure EP class gas cabinet designed and installed, and gas distribution cabinets widely used for wet etching (wet etching), dry etching (dry etching), atmospheric chemical vapor deposition (APCVD), low-pressure chemical vapor deposition (LPCVD), plasma chemical vapor deposition (PECVD). The gas supply service of semiconductor equipment such as sputtering (PF) and photolithography, and the actual characteristics of various factories are also calculated, and the dangerous gas monitoring and management system (GDS) has been developed tailor-made for the manufacturer's safety production. The tail gas treatment system of the above production equipment has been developed correspondingly, which ensures the discharge of factory exhaust gas to meet the standards.